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SPIE Proceedings [SPIE Medical Imaging II - Newport Beach, CA (Sunday 31 January 1988)] Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII - X Ray Mask Of Gold-Carbon Mixture Absorber On BCN Compound Substrate Fabricated By Plasma Processes
Aiyer, Chandrasekhar R., Itoh, Satoshi, Yamada, Hitomi, Morita, Shinzo, Hattori, Shuzo, Yanof, Arnold W.Volume:
923
Year:
1988
Language:
english
DOI:
10.1117/12.945628
File:
PDF, 2.02 MB
english, 1988