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Materials for lithography in the nanoscale
Argitis, Panagiotis, Niakoula, Dimitra, Douvas, Antonios M., Gogolides, Evangelos, Raptis, Ioannis, Vidali, Veroniki P., Couladouros, Elias A.Volume:
6
Year:
2009
Language:
english
Journal:
International Journal of Nanotechnology
DOI:
10.1504/ijnt.2009.021708
File:
PDF, 598 KB
english, 2009