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SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography - Thin-film filter lifetesting results in the extreme ultraviolet
Vedder, Peter W., Vallerga, John V., Gibson, James L., Stock, Joseph M., Siegmund, Oswald H. W., Hoover, Richard B., Walker II, Arthur B. C.Volume:
1742
Year:
1993
Language:
english
DOI:
10.1117/12.140582
File:
PDF, 489 KB
english, 1993