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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems - Novel reactive chemical mechanical polishing technology for fabrication of SiC mirrors
Singh, Rajiv K., Arjunan, Arul Chakkaravarthi, Balasundaram, Kannan, Jawali, Puneet, Ling, George, Singh, Deepika, Everson, William, Robichaud, Joseph L., Krödel, Matthias, Goodman, William A.Volume:
8837
Year:
2013
Language:
english
DOI:
10.1117/12.2024765
File:
PDF, 1.43 MB
english, 2013