SPIE Proceedings [SPIE Lasers, Optics, and Vision for...

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SPIE Proceedings [SPIE Lasers, Optics, and Vision for Productivity in Manufacturing I - Besancon, France (Monday 10 June 1996)] Micro-Optical Technologies for Measurement, Sensors, and Microsystems - Carbon super tips on AFM probes as near-field PSTM sensors

Castagne, Michel, Benfedda, M., Lahimer, S., Fillard, Jean-Pierre, Grimont, L., Parriaux, Olivier M.
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Volume:
2783
Year:
1996
Language:
english
DOI:
10.1117/12.248511
File:
PDF, 369 KB
english, 1996
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