SPIE Proceedings [SPIE Micromachining and Microfabrication...

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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Micromachining inertial instruments

Weinberg, Marc S., Bernstein, Jonathan J., Borenstein, Jeffrey T., Campbell, J., Cousens, J., Cunningham, Robert K., Fields, R., Greiff, Paul, Hugh, Brenda, Niles, Les, Sohn, Jerome B., Pang, Stella W
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Volume:
2879
Year:
1996
Language:
english
DOI:
10.1117/12.251201
File:
PDF, 1.21 MB
english, 1996
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