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SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 4 August 1996)] Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays - Selection of calibration particles for scanning surface inspection systems
Mulholland, George W., Bryner, Nelson, Liggett, Walter, Scheer, Bradley W., Goodall, Randal K., Stover, John C.Volume:
2862
Year:
1996
Language:
english
DOI:
10.1117/12.256195
File:
PDF, 1.04 MB
english, 1996