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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Powder blasting as a three-dimensional microstucturing technology for MEMS applications
Belloy, Eric, Zalunardo, I., Sayah, Abdeljlail, Gijs, Martin A. M., Karam, Jean Michel, Yasaitis, John A.Volume:
4174
Year:
2000
Language:
english
DOI:
10.1117/12.396467
File:
PDF, 773 KB
english, 2000