SPIE Proceedings [SPIE Micromachining and Microfabrication...

  • Main
  • SPIE Proceedings [SPIE Micromachining...

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] MOEMS and Miniaturized Systems - Scanning silicon micromirror using a bidirectionally movable magnetic microactuator

Cho, Hyoung J., Yan, Jun, Kowel, Stephen T., Beyette, Jr., Fred R., Ahn, Chong H., Motamedi, M. Edward, Goering, Rolf
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
4178
Year:
2000
Language:
english
DOI:
10.1117/12.396520
File:
PDF, 1.46 MB
english, 2000
Conversion to is in progress
Conversion to is failed