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SPIE Proceedings [SPIE Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes-Mandelieu, France (Wednesday 25 April 2001)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Stiction-controlled locking system for three-dimensional self-assembled microstructures: theory and experimental validation
Agache, Vincent, Buchaillot, Lionel, Quevy, Emmanuel, Collard, Dominique, Courtois, Bernard, Karam, Jean Michel, Levitan, Steven P., Markus, Karen W., Tay, Andrew A. O., Walker, James A.Volume:
4408
Year:
2001
Language:
english
DOI:
10.1117/12.425345
File:
PDF, 1.05 MB
english, 2001