SPIE Proceedings [SPIE Second International Symposium on Laser Precision Micromachining - Singapore, Singapore (Wednesday 16 May 2001)] Second International Symposium on Laser Precision Microfabrication - Comparison of machining strategies for ceramics using frequency-converted Nd:YAG and excimer lasers
Toenshoff, Hans K., Ostendorf, Andreas, Koerber, Klaus, Meyer, Klaus, Miyamoto, Isamu, Lu, Yong Feng, Sugioka, Koji, Dubowski, Jan J.Volume:
4426
Year:
2002
Language:
english
DOI:
10.1117/12.456888
File:
PDF, 501 KB
english, 2002