SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Cannes-Mandelieu, France (Tuesday 19 March 2002)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Silicon as material for mechanical wristwatches
Perret, Andre, Hoogerwerf, Arno, Niedermann, Philippe, Tang, Xiao-Ming, Jeanneret, Sylvain, Clerc, Pierre-Andre, de Rooij, Nico F., Gygax, Pierre, Courtois, Bernard, Karam, Jean Michel, Markus, KarenVolume:
4755
Year:
2002
Language:
english
DOI:
10.1117/12.462866
File:
PDF, 345 KB
english, 2002