SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Performance of liquid xenon jet laser-produced-plasma light source for EUV lithography
Suganuma, Takashi, Abe, Tamotsu, Komori, Hiroshi, Takabayashi, Yuichi, Endo, Akira, Miyamoto, Isamu, Helvajian, Henry, Itoh, Kazuyoshi, Kobayashi, Kojiro F., Ostendorf, Andreas, Sugioka, KojiYear:
2012
Language:
english
DOI:
10.1117/12.596356
File:
PDF, 417 KB
english, 2012