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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] Optical Micro- and Nanometrology in Microsystems Technology - Comparison of various optical characterization techniques for the surface analysis of optical-grade germanium infrared materials
Ottevaere, Heidi, Gorecki, Christophe, Asundi, Anand K., Szpak, Anna, Romandic, Igor, Osten, Wolfgang, Van Nylen, Jan, Vercammen, Hans, Vyncke, Dirk, Kujawinska, Malgorzata, Thienpont, HugoVolume:
6188
Year:
2006
Language:
english
DOI:
10.1117/12.663598
File:
PDF, 1.65 MB
english, 2006