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SPIE Proceedings [SPIE Optics East 2006 - Boston, MA (Sunday 1 October 2006)] Optomechatronic Actuators, Manipulation, and Systems Control - Real-time high-displacement amplified bimorph scanning mirror
Patterson, Paul E., Otani, Yukitoshi, Janabi-Sharifi, Farrokh, Zara, Jason M.Volume:
6374
Year:
2006
Language:
english
DOI:
10.1117/12.686383
File:
PDF, 484 KB
english, 2006