SPIE Proceedings [SPIE Photomask and Next-Generation...

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SPIE Proceedings [SPIE Photomask and Next-Generation Lithography Mask Technology XIV - Yokohama, Japan (Tuesday 17 April 2007)] Photomask and Next-Generation Lithography Mask Technology XIV - Implementation of double dipole lithography for 45-nm node poly and diffusion layer manufacturing with 0.93NA

Wu, Meng-Hsiu, Watanabe, Hidehiro, Hsu, Michael, Hsu, Stephen, Lu, Bo-Jou, Cheng, Yung-Feng, Chou, Yueh-Lin, Yang, Chuen-Huei
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Volume:
6607
Year:
2007
Language:
english
DOI:
10.1117/12.729020
File:
PDF, 870 KB
english, 2007
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