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SPIE Proceedings [SPIE Photonics Asia 2007 - Beijing, China (Sunday 11 November 2007)] Holography and Diffractive Optics III - Study on the fabrication of low-gradient photoresist grating masks
Liu, Quan, Sheng, Yunlong, Hsu, Dahsiung, Wan, Hua, Wu, Jianhong, Yu, Chongxiu, Chen, Xinrong, Li, ChaomingVolume:
6832
Year:
2007
Language:
english
DOI:
10.1117/12.755101
File:
PDF, 296 KB
english, 2007