SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Optical Micro- and Nanometrology in Microsystems Technology II - Characterization of MEMS cantilevers using lensless digital holographic microscope
Singh, Vijay Raj, Gorecki, Christophe, Asundi, Anand K., Andrei, Alexandru, Gorecki, Christophe, Osten, Wolfgang, Nieradko, Lukasz, Asundi, AnandVolume:
6995
Year:
2008
Language:
english
DOI:
10.1117/12.782981
File:
PDF, 420 KB
english, 2008