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SPIE Proceedings [SPIE NanoScience + Engineering - San Diego, California, USA (Sunday 10 August 2008)] Nanoengineering: Fabrication, Properties, Optics, and Devices V - A novel lithography technique for formation of large areas of uniform nanostructures
Wu, Wei, Dobisz, Elizabeth A., Eldada, Louay A., Dey, Dibyendu, Memis, Omer G., Katsnelson, Alex, Mohseni, HoomanVolume:
7039
Year:
2008
Language:
english
DOI:
10.1117/12.791534
File:
PDF, 372 KB
english, 2008