SPIE Proceedings [SPIE Seventh International Symposium on Instrumentation and Control Technology - Beijing, China (Friday 10 October 2008)] Seventh International Symposium on Instrumentation and Control Technology: Measurement Theory and Systems and Aeronautical Equipment - Research on a novel high sensitivity MOEMS deformable nano-grating accelerometer
Zhang, Bo, Fang, Jiancheng, Wang, Zhongyu, Fan, Zhikai, Feng, Lishuang, Zhang, QunyanVolume:
7128
Year:
2008
Language:
english
DOI:
10.1117/12.806718
File:
PDF, 393 KB
english, 2008