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SPIE Proceedings [SPIE International Conference of Optical Instrument and Technology - Beijing, China (Sunday 16 November 2008)] 2008 International Conference on Optical Instruments and Technology: Microelectronic and Optoelectronic Devices and Integration - A study of Hg 1-x Cd x Te surfaces processed using inductively coupled plasma with CH 4 /H 2 /N 2 /Ar mixture
Zhou, Wenhong, Zhang, Xuping, Bock, Wojtek J., Ye, Zhenhua, Hu, Xiaoning, Bao, Xiaoyi, Shum, Ping, Ding, Ruijun, He, LiVolume:
7158
Year:
2008
Language:
english
DOI:
10.1117/12.807068
File:
PDF, 708 KB
english, 2008