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SPIE Proceedings [SPIE Second International Conference on Smart Materials and Nanotechnology in Engineering - Weihai, China (Wednesday 8 July 2009)] Second International Conference on Smart Materials and Nanotechnology in Engineering - A new digital silicon MEMS gyroscope
Wu, L. F., Leng, Jinsong, Asundi, Anand K., Peng, Zh., Zhang, Wei, Ecke, Wolfgang, Zhang, F. X.Volume:
7493
Year:
2009
Language:
english
DOI:
10.1117/12.839936
File:
PDF, 675 KB
english, 2009