SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX - Lifetime estimation and reliability study of electrothermal MEMS actuators
Sivakumar, Ganapathy, Kullberg, Richard C., Ramesham, Rajeshuni, Johns, Stephen, Nava, Jesus A., Dallas, TimVolume:
7592
Year:
2010
Language:
english
DOI:
10.1117/12.842410
File:
PDF, 574 KB
english, 2010