![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Sixth International Symposium on Precision Engineering Measurements and Instrumentation - Hangzhou, China (Sunday 8 August 2010)] Sixth International Symposium on Precision Engineering Measurements and Instrumentation - A 2D coplanar translation stage with synchronous XY position metrology for surface scanning measurement
Xian, Kaiyi, Zhou, Liping, Liu, XiaojunVolume:
7544
Year:
2010
Language:
english
DOI:
10.1117/12.885663
File:
PDF, 13.12 MB
english, 2010