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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 21 January 2012)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V - Exposure controlled projection lithography for microlens fabrication
Jariwala, Amit S., Schwerzel, Robert E., Nikoue, Harold A., Rosen, David W., Schoenfeld, Winston V., Rumpf, Raymond C., von Freymann, GeorgVolume:
8249
Year:
2012
Language:
english
DOI:
10.1117/12.909087
File:
PDF, 6.36 MB
english, 2012