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SPIE Proceedings [SPIE Microlithography Conference - Santa Clara, CA (Monday 2 March 1987)] Integrated Circuit Metrology, Inspection, & Process Control - Linewidth Control In Trilevel Etching
Kornblit, Avi, Grieco, Michael J., Peters, Darryl W., Saunders, Thomas E., Monahan, Kevin M.Volume:
775
Year:
1987
Language:
english
DOI:
10.1117/12.940441
File:
PDF, 12.62 MB
english, 1987