SPIE Proceedings [SPIE 1988 Semiconductor Symposium -...

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SPIE Proceedings [SPIE 1988 Semiconductor Symposium - Newport Beach, CA (Monday 14 March 1988)] Spectroscopic Characterization Techniques for Semiconductor Technology III - Optical And Structural Characterization Of Boron Implanted GaAs

Bowman, Jr., R. C., Jamieson, D. N., Adams, P. M., Alt, R. L., Glembocki, Orest J., Pollak, Fred H., Ponce, Fernando A.
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Volume:
946
Year:
1988
Language:
english
DOI:
10.1117/12.947414
File:
PDF, 548 KB
english, 1988
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