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SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Surface and Interface Analysis of Microelectronic Materials Processing and Growth - Three-Dimensional Characterization of LiNbO3 Waveguides By Secondary Ion Mass Spectrometry (SIMS) Image Depth Profiling
Novak, Steven W., Kanber, Hilda, Bar, Stephan, Sridhar, Champa, Wilson, Robert, Brillson, Leonard J., Pollak, Fred H.Volume:
1186
Year:
1990
Language:
english
DOI:
10.1117/12.963930
File:
PDF, 8.13 MB
english, 1990