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ChemInform Abstract: Characterization of Silicon Nitride and Silicon Carbonitride Layers from 1,1,3,3,5,5-Hexamethylcyclotrisilazane (I) Plasmas.
BROOKS, T. A., HESS, D. W.Volume:
20
Journal:
ChemInform
DOI:
10.1002/chin.198913323
Date:
March, 1989
File:
PDF, 135 KB
1989