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P-15: Self-Aligned Top-Gate Zinc Oxide Thin Film Transistors Fabricated by Reactive Sputtering of Metallic Zinc Target
Zhang, Meng, Xia, Zhihe, Zhou, Wei, Chen, Rongsheng, Wong, Man, Kwok, Hoi-SingVolume:
46
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.10045
Date:
June, 2015
File:
PDF, 829 KB
english, 2015