Diagnostics of the plasma series resonance effect in...

Journal of Physics Conference Series 2007 / 10 Vol. 86

Diagnostics of the plasma series resonance effect in radio-frequency discharges

Schulze, J, Kampschulte, T, Luggenhölscher, D, Czarnetzki, U
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Volume:
86
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/86/1/012010
Date:
October, 2007
File:
PDF, 1.20 MB
english, 2007
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