![](/img/cover-not-exists.png)
Modeling of Probabilistic Failure of Polycrystalline Silicon MEMS Structures
Le, Jia-Liang, Ballarini, Roberto, Zhu, Zhiren, Ballarini, R.Volume:
98
Language:
english
Journal:
Journal of the American Ceramic Society
DOI:
10.1111/jace.13639
Date:
June, 2015
File:
PDF, 1.03 MB
english, 2015