SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography - Nonspecular x-ray scattering from Si/Mo multilayers
Slaughter, Jon M., Falco, Charles M., Hoover, Richard B., Walker II, Arthur B. C.Volume:
1742
Year:
1993
Language:
english
DOI:
10.1117/12.140601
File:
PDF, 321 KB
english, 1993