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SPIE Proceedings [SPIE OE/LASE '94 - Los Angeles, CA (Sunday 23 January 1994)] Spectroscopic Characterization Techniques for Semiconductor Technology V - Effects of P4 annealing on ordered Ga0.52In0.48P
Yin, Xiaoming, DeLong, Matthew C., Li, Q., Taylor, P. Craig, Jen, Hei-Ruey H., Williams, Jeannie E., Meehan, Kathleen, Glembocki, Orest J.Volume:
2141
Year:
1994
Language:
english
DOI:
10.1117/12.176858
File:
PDF, 587 KB
english, 1994