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SPIE Proceedings [SPIE Microlithography '90, 4-9 Mar, San Jose - San Jose, CA (Sunday 4 March 1990)] Integrated Circuit Metrology, Inspection, and Process Control IV - Ultraviolet-visible microspectrophotometer system for small-spot measurement and characterization of thin films
Coates, Vincent J., Lin, Warren, Johnson, Rodney P., Paull, Dennis, Arnold, William H.Volume:
1261
Year:
1990
Language:
english
DOI:
10.1117/12.20076
File:
PDF, 169 KB
english, 1990