SPIE Proceedings [SPIE Microlithography '90, 4-9 Mar, San Jose - San Jose, CA (Sunday 4 March 1990)] Optical/Laser Microlithography III - Microcircuit lithography using holographic imaging
Chen, Ray T., Aye, Tin M., Sadovnik, Lev S., Pelka, David G., Jannson, Tomasz P., Pol, VictorVolume:
1264
Year:
1990
Language:
english
DOI:
10.1117/12.20199
File:
PDF, 324 KB
english, 1990