SPIE Proceedings [SPIE Lasers and Optics in Manufacturing III - Munich, Germany (Monday 16 June 1997)] Optical Inspection and Micromeasurements II - Microelectromechanical systems (MEMS) and their photonic application
Uenishi, Yuji, Akimoto, Koji, Nagaoka, Shinji, Gorecki, ChristopheVolume:
3098
Year:
1997
Language:
english
DOI:
10.1117/12.281182
File:
PDF, 970 KB
english, 1997