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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachining and Microfabrication Process Technology III - Design of bulk micromachined suspensions
Fang, Weileun, Chang, Shih-Chia, Pang, Stella W.Volume:
3223
Year:
1997
Language:
english
DOI:
10.1117/12.284489
File:
PDF, 1.16 MB
english, 1997