![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachining and Microfabrication Process Technology III - Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer
Zou, Qiang, Lu, Deren, Li, Baoqing, Xiong, Xingguo, Xiong, Bin, Wang, Weiyuan, Chang, Shih-Chia, Pang, Stella W.Volume:
3223
Year:
1997
Language:
english
DOI:
10.1117/12.284492
File:
PDF, 1.09 MB
english, 1997