SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] MEMS Reliability for Critical Applications - Microsystems for diverse applications using recently developed microfabrication techniques
Dellmann, Laurent, Akiyama, Terunobu, Briand, Danick, Gautsch, Sebastien, Guenat, Olivier T., Guldimann, Benedikt, Luginbuhl, Philippe, Marxer, Cornel, Staufer, Urs, van der Schoot, Bart, de Rooij, NiVolume:
4180
Year:
2000
Language:
english
DOI:
10.1117/12.395706
File:
PDF, 1.57 MB
english, 2000