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SPIE Proceedings [SPIE International Symposium on Optoelectonics and Microelectronics - Nanjing, China (Wednesday 7 November 2001)] Micromachining and Microfabrication Process Technology and Devices - Development of microflowmeters and microlenses using a new 3D microfabrication-DEM technique
Chen, Di, Tang, Min, Wang, Zhimin, Li, Changmin, Ni, Zhiping, Zhou, Di, Tien, Norman C., Huang, Qing-AnVolume:
4601
Year:
2001
Language:
english
DOI:
10.1117/12.444717
File:
PDF, 675 KB
english, 2001