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SPIE Proceedings [SPIE Laser Processing of Advanced Materials and Laser Microtechnologies - Moscow, Russian Federation (Saturday 22 June 2002)] Laser Processing of Advanced Materials and Laser Microtechnologies - Laser technology of SNOM-tips fabrication: process diagnostics, processing, and testing
Veiko, Vadim P., Dausinger, Friedrich H., Konov, Vitali I., Kalachev, Alexey N., Kaporsky, Lev N., Baranov, Vladimir Y., Panchenko, Vladislav Y., Volkov, Sergey A., Voznesensky, Nikolay B.Volume:
5121
Year:
2002
Language:
english
DOI:
10.1117/12.515561
File:
PDF, 684 KB
english, 2002