SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, Ca (Sunday 25 January 2004)] Photon Processing in Microelectronics and Photonics III - Modeling the laser-induced diffusible resistance process
Herman, Peter R., Meunier, Michel, Degorce, Jean-Yves, Fieret, Jim, Pique, Alberto, Gillet, Jean-Numa, Magny, Francois, Okada, Tatsuo, Bachmann, Friedrich G., Hoving, Willem, Washio, Kunihiko, Xu, XiaVolume:
5339
Year:
2004
Language:
english
DOI:
10.1117/12.525512
File:
PDF, 1.07 MB
english, 2004