SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV - Manufacturability: from design to SPC limits through "corner-lot" characterization
Hogan, Timothy J., Tanner, Danelle M., Ramesham, Rajeshuni, Baker, James C., Wesneski, Lisa, Black, Robert S., Rothenbury, DaveVolume:
5716
Year:
2005
Language:
english
DOI:
10.1117/12.591725
File:
PDF, 388 KB
english, 2005