SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Silicon micromachining techniques as a tool to fabricate channeling-based devices
Antonini, A., Butturi, M., Guidi, V., Martinelli, G., Mazzolari, A., Milan, E., Dabagov, Sultan B.Year:
2012
Language:
english
DOI:
10.1117/12.741883
File:
PDF, 234 KB
english, 2012