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SPIE Proceedings [SPIE Photonics Asia 2007 - Beijing, China (Sunday 11 November 2007)] MEMS/MOEMS Technologies and Applications III - A novel microscanning device
Chiao, Jung-Chih, Zhou, Yun-yi, Yang, Chang-cheng, Chen, Xuyuan, Zhou, Zhaoying, Li, XinxinVolume:
6836
Year:
2007
Language:
english
DOI:
10.1117/12.760847
File:
PDF, 242 KB
english, 2007