SPIE Proceedings [SPIE Photomask and NGL Mask Technology...

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SPIE Proceedings [SPIE Photomask and NGL Mask Technology XVI - Yokohama, Japan (Wednesday 8 April 2009)] Photomask and Next-Generation Lithography Mask Technology XVI - Lithography compliance check considering neighboring cell structures for robust cell design

Miyairi, Masahiro, Hosono, Kunihiro, Nojima, Shigeki, Maeda, Shimon, Kodera, Katsuyoshi, Ogawa, Ryuji, Tanaka, Satoshi
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Volume:
7379
Year:
2009
Language:
english
DOI:
10.1117/12.824278
File:
PDF, 3.38 MB
english, 2009
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