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SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX - The effects of plasma pretreatment and storage time on silicon fusion bonding
O'Neal, Chad B., Kullberg, Richard C., Ramesham, Rajeshuni, Soman, JoelVolume:
7592
Year:
2010
Language:
english
DOI:
10.1117/12.839972
File:
PDF, 3.96 MB
english, 2010