SPIE Proceedings [SPIE Fundamentals of Laser Assisted Micro- and Nanotechnologies 2010 - St. Petersburg, Russian Federation (Monday 5 July 2010)] Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010 - Adaptive control system for laser micromachining devices
Bessmeltsev, V. P., Veiko, Vadim P., Vartanyan, Tigran A., Bulushev, E. D., Goloshevsky, N. V.Volume:
7996
Year:
2010
Language:
english
DOI:
10.1117/12.887375
File:
PDF, 819 KB
english, 2010