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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Alternative Lithographic Technologies IV - Contact hole shrink process using directed self-assembly
Seino, Yuriko, Yonemitsu, Hiroki, Sato, Hironobu, Kanno, Masahiro, Kato, Hikazu, Kobayashi, Katsutoshi, Kawanishi, Ayako, Azuma, Tsukasa, Muramatsu, Makoto, Nagahara, Seiji, Kitano, Takahiro, Toshima,Volume:
8323
Year:
2012
Language:
english
DOI:
10.1117/12.915652
File:
PDF, 588 KB
english, 2012